CMP\u5168\u7a31\u70baChemical-Mechanical Planarization\uff0c\u76f4\u8b6f\u904e\u4f86\u5c31\u662f\u300c\u5316\u5b78\u6a5f\u68b0\u5e73\u5766\u5316\u300d\u7684\u610f\u601d\uff0c\u662f\u96c6\u6210\u96fb\u8def\u88fd\u9020\u5de5\u85dd\u904e\u7a0b\u4e2d\u5be6\u73fe\u6676\u5713\u8868\u9762\u5e73\u5766\u5316\u7684\u95dc\u9375\u6280\u8853\u3002<\/p>\n
![\"\"](\"https:\/\/makeraze.com\/wp-content\/uploads\/2023\/05\/image-37.png\")
<\/figure>\n<\/div>\n\n\n\u6676\u5713\u88fd\u9020\u904e\u7a0b\u4e3b\u8981\u5305\u62ec7\u500b\u76f8\u4e92\u7368\u7acb\u7684\u5de5\u85dd\u6d41\u7a0b\uff1a\u5149\u523b\u3001\u523b\u8755\u3001\u8584\u819c\u751f\u9577\u3001\u64f4\u6563\u3001\u96e2\u5b50\u6ce8\u5165\u3001\u5316\u5b78\u6a5f\u68b0\u62cb\u5149\u3001\u91d1\u5c6c\u5316\u3002
\u4f5c\u70ba\u6676\u5713\u88fd\u9020\u7684\u95dc\u9375\u5236\u7a0b\u5de5\u85dd\u4e4b\u4e00\uff0c\u5316\u5b78\u6a5f\u68b0\u62cb\u5149\u6307\u7684\u662f\u3002<\/p>\n\n
\u901a\u904e\u5316\u5b78\u8150\u8755\u8207\u6a5f\u68b0\u7814\u78e8\u7684\u5354\u540c\u914d\u5408\u4f5c\u7528\uff0c\u5be6\u73fe\u6676\u5713\u8868\u9762\u591a\u9918\u6750\u6599\u7684\u9ad8\u6548\u53bb\u9664\u8207\u5168\u5c40\u7d0d\u7c73\u7d1a\u5e73\u5766\u5316\u3002<\/p>\n\n\n\n
CMP\u4f5c\u696d\u539f\u7406<\/strong><\/h4>\n\n\n\n![\"\"](\"https:\/\/makeraze.com\/wp-content\/uploads\/2023\/05\/image-38.png\")
<\/figure>\n<\/div>\n\n\n\u901a\u904eCMP\u8a2d\u5099\uff0c\u5229\u7528\u62cb\u5149\u982d\u5c07\u6676\u5713\u9700\u8981\u62cb\u5149\u7684\u5411\u4e0b\u6309\u58d3\u5728\u62cb\u5149\u588a\u4e0a\uff0c\u540c\u6642\u52a0\u5165\u62cb\u5149\u6db2\uff08\u7814\u78e8\u6db2\uff09\uff0c\u96a8\u5f8c\u62cb\u5149\u76e4\u5e36\u52d5\u62cb\u5149\u588a\u65cb\u8f49\uff0c\u5229\u7528\u62cb\u5149\u6db2\u91cc\u7684\u5fae\u7c92\u8207\u7c97\u7cd9\u7684\u62cb\u5149\u588a\u4e00\u540c\u6469\u64e6\uff0c\u5f9e\u800c\u5be6\u73fe\u5168\u5c40\u5e73\u5766\u5316\u3002 <\/p>\n\n\n
\n![\"\"](\"https:\/\/makeraze.com\/wp-content\/uploads\/2023\/05\/image-44.png\")
<\/figure>\n<\/div>\n\n\nCMP\u4e3b\u8981\u8017\u6750<\/strong><\/h4>\n\n\n\n1.\u62cb\u5149\u6db2\uff08\u7814\u78e8\u6db2\uff09<\/strong><\/p>\n\n\u7814\u78e8\u6db2\u7684\u6311\u9078\u8981\u6ce8\u610f\u4ee5\u4e0b\u5e7e\u500b\u8981\u7d20\uff1a\u61f8\u6d6e\u6db2\u96dc\u8cea\u7d14\u5ea6\u3001\u4e8c\u6c27\u5316\u7845\u9846\u7c92\u5c3a\u5bf8\u3001\u4e8c\u6c27\u5316\u7845\u9846\u7c92\u786c\u5ea6\u53ca\u5747\u52fb\u5ea6\u3001\u7814\u78e8\u6db2\u5728Lapping\u4f5c\u696d\u4e2d\u662f\u5426\u6703\u6790\u51fa\u7d50\u6676\u800c\u5f71\u97ff\u6676\u5713\u54c1\u8cea\u3001\u8868\u9762\u6d3b\u6027\u5291\u7684\u9078\u53d6\u53ca\u6bd4\u4f8b\u3001PH\u503c\u8abf\u7bc0\u3001\u6c27\u5316\u5291\u9078\u53d6\u53ca\u6bd4\u4f8b\u7b49\u7b49\u3002<\/p>\n\n
\u5982\uff1a\u4e8c\u6c27\u5316\u7845\uff08SIO2\uff09\u3001\u6c2b\u6c27\u5316\u92a8\uff08NH4OH\uff09\u3001\u6709\u6a5f\u5316\u5408\u7269\uff08ORGANIC COMPOUND\uff09\u3001\u6c34\uff08H2O\uff09<\/p>\n\n\n
\n![\"\"](\"https:\/\/makeraze.com\/wp-content\/uploads\/2023\/05\/image-39.png\")
<\/figure>\n<\/div>\n\n\n2.\u7814\u78e8\u588a<\/strong><\/p>\n\n\uff081\uff09\u7814\u78e8\u6db2\u8981\u80fd\u5920\u5728\u7814\u78e8\u588a\u4e0a\u6709\u8f03\u597d\u7684\u4fdd\u6301\u6027\uff0c\u624d\u80fd\u5920\u4fdd\u6301\u9ad8\u6548\u7387\u7684\u62cb\u5149\u6548\u679c<\/p>\n\n
\uff082\uff09\u7814\u78e8\u588a\u7684\u8868\u9762\u6709\u9069\u7576\u7684\u786c\u5ea6\uff0c\u624d\u80fd\u4fdd\u8b49\u78e8\u5e73\u6548\u679c<\/p>\n\n
\uff083\uff09\u62cb\u5149\u588a\u6709\u8f03\u597d\u7684\u67d4\u8edf\u6027\uff0c\u53ef\u4ee5\u96a8\u8457\u82af\u7247\u7684\u5f4e\u66f2\u800c\u8b8a\u5f62\uff0c\u4ee5\u4fdd\u8b49\u7372\u5f97\u66f4\u597d\u7684\u5747\u52fb\u5ea6<\/p>\n\n
\uff084\uff09\u7814\u78e8\u5f8c\u80fd\u5920\u5c07\u6240\u7522\u751f\u7684\u300c\u526f\u7522\u54c1\u300d\u6392\u51fa\uff0c\u7814\u78e8\u518d\u73fe\u6027\u66f4\u4f73<\/p>\n\n
\uff085\uff09\u6e1b\u5c11\u7814\u78e8\u588a\u6750\u6599\u7684\u96dc\u8cea\uff0c\u4ee5\u7372\u5f97\u826f\u597d\u7684\u6e05\u6f54\u6548\u679c<\/p>\n\n\n
\n![\"\"](\"https:\/\/makeraze.com\/wp-content\/uploads\/2023\/05\/image-40.png\")
<\/figure>\n<\/div>\n\n\nCMP\u8a2d\u5099<\/strong><\/h4>\n\n\n\nCMP\u8a2d\u5099\u80fd\u5920\u901a\u904e\u7d42\u9ede\u6aa2\u6e2c\u7cfb\u7d71\u5c0d\u4e0d\u540c\u6750\u8cea\u548c\u539a\u5ea6\u7684\u78e8\u8e6d\u9032\u884c\u5be6\u6642\u539a\u5ea6\u6e2c\u91cf\u9632\u6b62\u904e\u62cb\u3002 <\/p>\n\n
\u4e26\u4e14\u80fd\u5920\u5168\u5c40\u5206\u5340\u65bd\u58d3\u7684\u62cb\u5149\u982d\uff0c\u5728\u9650\u5b9a\u7684\u7a7a\u9593\u5167\u5c0d\u6676\u5713\u5168\u5c40\u7684\u591a\u500b\u74b0\u72c0\u5340\u57df\u5be6\u73fe\u8d85\u7cbe\u5bc6\u53ef\u63a7\u55ae\u5411\u52a0\u58d3\uff0c\u5f9e\u800c\u53ef\u4ee5\u97ff\u61c9\u62cb\u5149\u76e4\u6e2c\u91cf\u7684\u819c\u539a\u6578\u64da\u8abf\u7bc0\u58d3\u529b\u63a7\u5236\u6676\u5713\u62cb\u5149\u5f62\u8c8c\uff0c\u4f7f\u6676\u5713\u62cb\u5149\u5f8c\u8868\u9762\u9054\u5230\u8d85\u9ad8\u5e73\u6574\u5ea6\u3002 <\/p>\n\n
\u5c0dCMP\u8a2d\u5099\u800c\u8a00\uff0c\u5176\u7522\u696d\u5316\u95dc\u9375\u6307\u6a19\u5305\u62ec\u5de5\u85dd\u4e00\u81f4\u6027\u3001\u751f\u7522\u6548\u7387\u3001\u53ef\u9760\u6027\u7b49\uff0cCMP \u8a2d\u5099\u7684\u4e3b\u8981\u6aa2\u6e2c\u53c3\u6578\u5305\u62ec\u7814\u78e8\u901f\u7387\u3001\u7814\u78e8\u5747\u52fb\u6027\u548c\u7f3a\u9677\u91cf\u3002 <\/p>\n\n\n
\n![\"\"](\"https:\/\/makeraze.com\/wp-content\/uploads\/2023\/05\/image-41.png\")
<\/figure>\n<\/div>\n\n\n\uff081\uff09\u7814\u78e8\u901f\u7387\uff1a\u55ae\u4f4d\u6642\u9593\u5167\u6676\u5713\u8868\u9762\u6750\u6599\u88ab\u7814\u78e8\u7684\u7e3d\u91cf\u3002<\/p>\n\n
\uff082\uff09\u7814\u78e8\u5747\u52fb\u6027\uff1a\u5206\u70ba\u7247\u5167\u5747\u52fb\u6027\u548c\u7247\u9593\u5747\u52fb\u6027\u3002\u7247\u5167\u5747\u52fb\u6027\u6307\u67d0\u500b\u6676\u5713\u7814\u78e8\u901f\u7387\u7684\u6a19\u6e96\u65b9\u5dee\u548c\u7814\u78e8\u901f\u7387\u7684\u6bd4\u503c\uff1b\u7247\u9593\u5747\u52fb\u6027\u7528\u65bc\u8868\u793a\u4e0d\u540c\u5713\u7247\u5728\u540c\u4e00\u689d\u4ef6\u4e0b\u7814\u78e8\u901f\u7387\u7684\u4e00\u81f4\u6027\u3002 <\/p>\n\n
\uff083\uff09\u7f3a\u9677\u91cf\uff1a\u5c0d\u65bcCMP\u800c\u8a00\uff0c\u4e3b\u8981\u7684\u7f3a\u9677\u5305\u62ec\u8868\u9762\u9846\u7c92\u3001\u8868\u9762\u522e\u50b7\u3001\u7814\u78e8\u5291\u6b98\u7559\uff0c \u9019\u4e9b\u5c07\u76f4\u63a5\u5f71\u97ff\u7522\u54c1\u7684\u6210\u54c1\u7387\u3002<\/p>\n\n
\u7531\u65bcCMP\u8a2d\u5099\u7684\u4f5c\u696d\u539f\u7406\uff0c\u70ba\u4e86CMP\u8a2d\u5099\u80fd\u5920\u6b63\u5e38\u904b\u884c\uff0c\u8a2d\u5099\u7684\u62cb\u5149\u982d\u3001\u4fdd\u6301\u74b0\u3001\u6c23\u819c\u3001\u6e05\u6d17\u5237\u3001\u947d\u77f3\u789f\u7b49\u95dc\u9375\u8017\u6750\u4e5f\u6703\u56e0\u70ba\u9577\u671f\u6469\u64e6\u800c\u5c0e\u81f4\u5feb\u901f\u640d\u8017\uff0c\u56e0\u6b64\u9700\u8981\u5c0d\u8a2d\u5099\u9032\u884c\u5b9a\u671f\u7dad\u4fdd\u66f4\u65b0\u3002<\/p>\n\n\n\n
CMP\u4fdd\u6301\u74b0<\/strong><\/h4>\n\n\n\n\u7531\u65bc\u534a\u5c0e\u9ad4\u6280\u8853\u7684\u5feb\u901f\u767c\u5c55\uff0c\u5ee0\u5bb6\u70ba\u4e86\u80fd\u5920\u63d0\u5347\u82af\u7247\u7522\u91cf\uff0c\u4e26\u4e14\u964d\u4f4e\u751f\u7522\u6210\u672c\uff0c\u6676\u5713\u7684\u76f4\u5f91\u4e0d\u65b7\u589e\u5927\uff1b<\/p>\n\n
\u76f4\u5f91\u7684\u589e\u5927\u4e5f\u5c31\u5c0e\u81f4\u4e86\u52a0\u5de5\u904e\u7a0b\u4e2d\u5bb9\u6613\u51fa\u73fe\u7ff9\u66f2\u8b8a\u5f62\uff0c\u5c0d\u65bc150mm\u76f4\u5f91\u4ee5\u4e0a\u7684\u6676\u5713\u9084\u6703\u9020\u6210\u908a\u7de3\u300c\u904e\u78e8\u300c\u7684\u73fe\u8c61\uff0c\u70ba\u4e86\u4e0d\u56e0\u6b64\u5c0e\u81f4\u62cb\u5149\u8cea\u91cf\u4ee5\u53ca\u6676\u5713\u5229\u7528\u7387\u7684\u964d\u4f4e\uff0c\u56e0\u6b64\u7522\u751f\u4e86CMP\u4fdd\u6301\u74b0\u3002 <\/p>\n\n\n
\n![\"\"](\"https:\/\/makeraze.com\/wp-content\/uploads\/2023\/05\/image-43.png\")
<\/figure>\n<\/div>\n\n\nCMP\u4fdd\u6301\u74b0\u80fd\u5920\u518dCMP\u8a2d\u5099\u4f5c\u696d\u904e\u7a0b\u4e2d\u8d77\u5230\u56fa\u5b9a\u6676\u5713\u7684\u4f5c\u7528\uff0c\u5c07\u908a\u7de3\u7684\u62cb\u5149\u588a\u548c\u6676\u5713\u4ee5\u4e0b\u7684\u62cb\u5149\u588a\u6309\u58d3\u5230\u540c\u6a23\u7684\u9ad8\u5ea6\uff0c\u6709\u6548\u5730\u89e3\u6c7a\u4e86\u908a\u7de3\u300c\u904e\u78e8\u300c\u7684\u554f\u984c\u3002<\/p>\n\n\n\n
\u53c3\u8003\u8cc7\u6599\uff1a<\/strong><\/p>\n\n1.\u300a\u5316\u5b78\u6a5f\u68b0\u62cb\u5149\u4fdd\u6301\u74b0\u5de5\u85dd\u53c3\u6578\u53ca\u78e8\u640d\u6a21\u578b\u7684\u7814\u7a76\u300b\uff0c\u897f\u5317\u5de5\u696d\u5927\u5b78\uff0c\u9ec3\u674f\u5229<\/p>\n\n
2.\u300aCMP TRIBOLOGICAL STUDY OF CARRIER RING PLASTIC MATERIALS\u300b,W.G.Easter,G. D. Willis,etc <\/p>\n\n\n\n
\u6211\u53f8\u62cb\u78e8\u6280\u8853\u7d93\u9a57\u8c50\u5bcc\uff0c\u5c0d\u65bc\u5de5\u4ef6\u7684\u8868\u9762\u8655\u7406\u6709\u591a\u5e74\u7684\u5be6\u969b\u64cd\u4f5c\u7d93\u9a57\u548c\u6e2c\u8a66\u65b9\u6848\u3001\u904e\u7a0b\u7b49\uff0c\u53ef\u6839\u64da\u4e0d\u540c\u7684\u54c1\u8cea\u8981\u6c42\u5b9a\u5236\u6700\u512a\u62cb\u5149\u89e3\u6c7a\u65b9\u6848\u3002 <\/strong><\/p>\n\n\u5982\u60a8\u5c0d\u4e0a\u8ff0CMP\u6676\u5713\u7814\u78e8\u60f3\u8981\u4e00\u6b65\u77ad\u89e3\uff0c\u6b61\u8fce\u6383\u63cf\u4e0b\u65b9\u4e8c\u7dad\u78bc\uff0c\u8207\u6211\u53f8\u5ba2\u670d\u806f\u7e6b\u3002<\/strong><\/p>\n\n\n\n\n\n<\/p>\n\n
<\/p>\n\n
<\/p>\n","protected":false},"excerpt":{"rendered":"
\u800c\u525b\u5207\u5272\u5f8c\u7684\u6676\u5713\u8868\u9762\u6709\u7455\u75b5\u4e14\u7c97\u7cd9\uff0c\u6703\u5f71\u97ff\u96fb\u8def\u7684\u7cbe\u5bc6\u5ea6\uff0c\u56e0\u6b64\u9700\u8981\u5c0d\u5176\u9032\u884c\u9032\u4e00\u6b65\u7684\u52a0\u5de5\u3002 <\/p>\n","protected":false},"author":2,"featured_media":14745,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[236,231],"tags":[395,238,239,242,442,309],"class_list":["post-17774","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news-zh-hant","category-231","tag-cmp-zh-hant","tag-polishing-zh-hant","tag-polishing-and-sanding-zh-hant","tag-sanding-zh-hant","tag-442","tag-309"],"yoast_head":"\n
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CMP\u4fdd\u6301\u74b0<\/strong><\/h4>\n\n\n\n\u7531\u65bc\u534a\u5c0e\u9ad4\u6280\u8853\u7684\u5feb\u901f\u767c\u5c55\uff0c\u5ee0\u5bb6\u70ba\u4e86\u80fd\u5920\u63d0\u5347\u82af\u7247\u7522\u91cf\uff0c\u4e26\u4e14\u964d\u4f4e\u751f\u7522\u6210\u672c\uff0c\u6676\u5713\u7684\u76f4\u5f91\u4e0d\u65b7\u589e\u5927\uff1b<\/p>\n\n
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\n<\/figure>\n<\/div>\n\n\nCMP\u4fdd\u6301\u74b0\u80fd\u5920\u518dCMP\u8a2d\u5099\u4f5c\u696d\u904e\u7a0b\u4e2d\u8d77\u5230\u56fa\u5b9a\u6676\u5713\u7684\u4f5c\u7528\uff0c\u5c07\u908a\u7de3\u7684\u62cb\u5149\u588a\u548c\u6676\u5713\u4ee5\u4e0b\u7684\u62cb\u5149\u588a\u6309\u58d3\u5230\u540c\u6a23\u7684\u9ad8\u5ea6\uff0c\u6709\u6548\u5730\u89e3\u6c7a\u4e86\u908a\u7de3\u300c\u904e\u78e8\u300c\u7684\u554f\u984c\u3002<\/p>\n\n\n\n
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<\/figure>\n<\/div>\n\n\nCMP\u4fdd\u6301\u74b0<\/strong><\/h4>\n\n\n\n
<\/figure>\n<\/div>\n\n\n