{"id":16931,"date":"2023-06-25T17:37:33","date_gmt":"2023-06-25T09:37:33","guid":{"rendered":"https:\/\/makeraze.com\/2023\/06\/%e7%84%a1%e6%90%8d%e6%8b%8b%e5%85%89%e6%b3%95%e5%af%b6%ef%bc%9a%e7%a0%94%e7%a3%a8%e6%b6%b2%ef%bc%88slurry%ef%bc%89\/"},"modified":"2023-06-25T17:37:34","modified_gmt":"2023-06-25T09:37:34","slug":"%e7%84%a1%e6%90%8d%e6%8b%8b%e5%85%89%e6%b3%95%e5%af%b6%ef%bc%9a%e7%a0%94%e7%a3%a8%e6%b6%b2%ef%bc%88slurry%ef%bc%89","status":"publish","type":"post","link":"https:\/\/makeraze.com\/zh-hant\/2023\/06\/%e7%84%a1%e6%90%8d%e6%8b%8b%e5%85%89%e6%b3%95%e5%af%b6%ef%bc%9a%e7%a0%94%e7%a3%a8%e6%b6%b2%ef%bc%88slurry%ef%bc%89\/","title":{"rendered":"\u7121\u640d\u62cb\u5149\u6cd5\u5bf6\uff1a\u7814\u78e8\u6db2\uff08Slurry\uff09"},"content":{"rendered":"\n

CMP\u5168\u7a31\u70baChemical-Mechanical Planarization<\/p>\n\n

\u7814\u78e8\u6db2\uff0c\u82f1\u6587\u540d\u7a31\u70baSlurry\uff0c\u4e5f\u53ef\u4ee5\u8b6f\u70ba\u300c\u61f8\u6d6e\u6db2\u300d\uff0c\u6307\u56fa\u9ad4\u9846\u7c92\u652a\u62cc\u5230\u6c34\u4e2d\uff0c\u4e0d\u88ab\u6eb6\u89e3\u4e14\u5206\u6563\u5728\u6db2\u9ad4\u5176\u4e2d\uff0c\u4e00\u65e6\u6df7\u5408\u7269\u505c\u6b62\u9707\u8569\u6642\u5c31\u6703\u6c88\u6fb1\u4e0b\u4f86\uff0c\u662f\u4e00\u7a2e\u4e0d\u5747\u52fb\u7684\u3001\u7570\u8cea\u7684\u6df7\u5408\u7269\u3002 <\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u61f8\u6d6e\u6db2\u4e2d\u7684\u9846\u7c92\u6700\u7d42\u80fd\u5426\u5b8c\u5168\u6c88\u964d\u5230\u5e95\u90e8\uff0c\u6d89\u53ca\u5230\u4ee5\u4e0b\u5e7e\u500b\u56e0\u7d20\uff1a<\/strong><\/p>\n\n

\u2022\u6db2\u9ad4\u8868\u9762\u7684\u5f35\u529b<\/strong><\/p>\n\n

\u2022\u6db2\u9ad4\u5206\u5b50\u71b1\u904b\u52d5-\u57fa\u672c\u4e0a\u4f86\u8aaa\u90fd\u662f\u6c34<\/strong><\/p>\n\n

\u2022\u56fa\u9ad4\u9846\u7c92\u7684\u5927\u5c0f<\/strong><\/p>\n\n\n\n

\u7576\u56fa\u9ad4\u9846\u7c92\u7684\u9ad4\u7a4d\u4ee5\u53ca\u5bc6\u5ea6\u9054\u5230\u8db3\u5920\u5c0f\u7684\u6642\u5019\uff0c\u6db2\u9ad4\u8868\u9762\u5c31\u6703\u5177\u6709\u8f03\u9ad8\u7684\u5f35\u529b\uff0c\u56e0\u6b64\u5f62\u6210\u4e86\u4e00\u7a2e\u76f8\u5c0d\u7a69\u5b9a\u7684\u61f8\u6d6e\u6db2\u3002<\/p>\n\n

\u8209\u4f8b\u4f86\u8aaa\uff0c\u6211\u5011\u53ef\u4ee5\u5617\u8a66\u7528\u8eab\u9ad4\u78e8\u7802\u818f\u4f86\u7406\u89e3\u7814\u78e8\u6db2\uff0c\u56e0\u70ba\u78e8\u7802\u818f\u5c31\u662f\u4e00\u7a2e\u5178\u578b\u7684\u7814\u78e8\u6db2\u6fc3\u7e2e\u7269\uff0c\u5176\u4e2d\u542b\u6709\u7684\u56fa\u9ad4\u9846\u7c92\u5728\u76ae\u819a\u4e0a\u9032\u884c\u7814\u78e8\u6469\u64e6\uff0c\u80fd\u5920\u5e6b\u52a9\u5c07\u76ae\u819a\u8001\u820a\u89d2\u8cea\u53bb\u9664\uff0c\u5f9e\u800c\u9054\u5230\u5c07\u76ae\u819a\u78e8\u5149\u6ed1\u7684\u6548\u679c\u3002 <\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

CMP\u7814\u78e8\u6db2\uff08SLURRY\uff09\u662f\u5de5\u4ef6\u8868\u9762\u5e73\u5766\u5316\u5de5\u85dd\u904e\u7a0b\u4e2d\u6240\u4f7f\u7528\u7684\u4e00\u7a2e\u6df7\u5408\u7269\uff0c\u7531\u7814\u78e8\u6750\u6599\u53ca\u5316\u5b78\u6dfb\u52a0\u5291\u7d44\u6210\u3002<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u7814\u78e8\u6db2\u4e3b\u8981\u6210\u5206\u5305\u62ec\u7814\u78e8\u5291\u3001\u8868\u9762\u6d3b\u6027\u5291\u3001PH\u7de9\u885d\u81a0\u3001\u6c27\u5316\u5291\u548c\u9632\u8150\u5291\u7b49\uff0c\u5176\u4e2d\u7814\u78e8\u5291\u53c8\u7531\u4e8c\u6c27\u5316\u7845\uff08SIO2<\/sub>\uff09\u3001\u4e09\u6c27\u5316\u4e8c\u92c1\uff08AL2<\/sub>O3<\/sub>\uff09\u3001\u6c27\u5316\u9230\uff08CEO2<\/sub>\uff09\u3001\u96d9\u6c27\u6c34\uff08H2<\/sub>O2<\/sub>\uff09\u3001\u6c2b\u6c27\u5316\u9240\uff08KOH\uff09\u3001\u4e8c\u6c27\u5316\u9333\uff08MNO2<\/sub>\uff09\u3001\u785d\u9178\u9435\uff08FE(NO3<\/sub>)3<\/sub>\uff09\u3001\u7898\u9178\u9240\uff08KIO3<\/sub>\uff09\u3001\u6c28\u6c34\uff08NH4<\/sub>OH\uff09\u7b49\u7b49\u6210\u5206\u7d44\u6210\u3002 <\/p>\n\n\n\n

\u534a\u5c0e\u9ad4\u62cb\u5149<\/strong><\/p>\n\n\n\n

\u65e9\u572820\u4e16\u7d0060\u5e74\u4ee3\uff0c\u7f8e\u570b\u4e00\u5bb6\u8457\u540d\u516c\u53f8\u5c31\u9996\u6b21\u63d0\u51fa\u4e86\u5229\u7528\u4e8c\u6c27\u5316\u7845\u6eb6\u81a0\u548c\u51dd\u81a0\u5728\u7845\u6676\u5713\u7247\u4e0a\u9032\u884c\u62cb\u5149\u7814\u78e8\uff1b <\/p>\n\n

\u81ea\u6b64\uff0c\u5728\u534a\u5c0e\u9ad4\u88fd\u4f5c\u5de5\u85dd\u904e\u7a0b\u4e2d\uff0c\u534a\u5c0e\u9ad4\u5c08\u7528\u7684\u62cb\u5149\u6db2\u6210\u70ba\u4e86\u4e0d\u53ef\u5206\u5272\u7684\u4e00\u90e8\u5206\u3002<\/p>\n\n

\u6642\u81f3\u4eca\u65e5\uff0c\u76ee\u524d\u7814\u78e8\u6db2\u7684\u5168\u7403\u4e3b\u6d41\u5ee0\u724c\u4e3b\u8981\u662fVersum Materials, Saint-Gobain, Eminess, Fujimi, Dow Chemicals, Cabot Microelectronic, FujiFilm, BASF, 3M, Evonik, and Hitachi Chemical \u4ee5\u53ca\u5176\u4ed6\u3002<\/p>\n\n

\u82af\u7247\u7684\u88fd\u9020\u904e\u7a0b\u662f\u4e00\u5c64\u53c8\u4e00\u5c64\u7684\uff0c\u7576\u4e2d\u5fc5\u9808\u8981\u5148\u78ba\u4fdd\u597d\u672c\u5c64\u7684\u5e73\u5766\u5ea6\uff0c\u624d\u80fd\u5920\u9032\u884c\u4e0b\u4e00\u5c64\u7684\u88fd\u4f5c\u3002<\/p>\n\n

\u800c\u6676\u7247\uff08WAFER\uff09\u8868\u9762\u662f\u4e0d\u5e73\u6574\u7684\uff0c\u4e26\u4e14\u88fd\u4f5c\u904e\u7a0b\u4e2d\u7159\u5875\u8f03\u5927\uff0c\u7121\u6cd5\u4fdd\u8b49\u5176\u5e73\u6574\u5ea6\u5408\u683c\uff1b <\/p>\n\n

\u56e0\u6b64\u5c31\u9700\u8981\u5316\u5b78\u6a5f\u68b0\u7814\u78e8\u5e73\u5766\u5316\u7684\u5354\u52a9\uff0c\u5373\u5c07\u7814\u78e8\u6db2\u8207\u7814\u78e8\u5237\u9032\u884c\u642d\u914d\u4f7f\u7528\uff0c\u901a\u904e\u7528\u529b\u6469\u64e6\u548c\u62fc\u547d\u65cb\u8f49\u7684\u904e\u7a0b\uff0c\u5c07\u4e0d\u5e73\u6574\u7684\u90e8\u5206\u7d66\u78e8\u5e73\u3002 <\/p>\n\n

\u800c\u78e8\u6389\u7684\u90e8\u5206\u5305\u62ec\u6709\u9285\u819c\u3001\u6c27\u5316\u7845\u819c\u3001\u93a2\u819c\u3001\u7845\u819c\u3001LOW-K\u819c\u7b49\u7b49\u3002<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n
\n
\"\"
\u6676\u7247\u8868\u9762\u7684\u4e0d\u5e73\u5766\u5be6\u62cd\u5716<\/figcaption><\/figure>\n<\/div>\n\n\n

\u7814\u78e8\u6db2\u5982\u4f55\u6311\u9078\uff1f<\/strong><\/p>\n\n\n\n

\u7814\u78e8\u6db2\u7684\u6311\u9078\u8981\u6ce8\u610f\u4ee5\u4e0b\u5e7e\u500b\u8981\u7d20\uff1a\u61f8\u6d6e\u6db2\u96dc\u8cea\u7d14\u5ea6\u3001\u4e8c\u6c27\u5316\u7845\u9846\u7c92\u5c3a\u5bf8\u3001\u4e8c\u6c27\u5316\u7845\u9846\u7c92\u786c\u5ea6\u53ca\u5747\u52fb\u5ea6\u3001\u8868\u9762\u6d3b\u6027\u5291\u7684\u9078\u53d6\u53ca\u6bd4\u4f8b\u3001PH\u503c\u8abf\u7bc0\u3001\u6c27\u5316\u5291\u9078\u53d6\u53ca\u6bd4\u4f8b\u7b49\u7b49\u3002<\/p>\n\n

\u5982\uff1a <\/p>\n\n

\u4e8c\u6c27\u5316\u7845\uff08SIO2<\/sub>\uff09 < 3%<\/p>\n\n

\u6c2b\u6c27\u5316\u92a8\uff08NH4<\/sub>OH\uff09<0.2% <\/p>\n\n

\u6709\u6a5f\u5316\u5408\u7269\uff08ORGANIC COMPOUND\uff09< 0.2%<\/p>\n\n

\u6c34\uff08H2<\/sub>O\uff09>96.6%\u4ee5\u4e0a<\/p>\n\n\n\n

\u7814\u78e8\u588a\u5982\u4f55\u6311\u9078\uff1f<\/strong><\/p>\n\n\n\n

1.\u7814\u78e8\u6db2\u8981\u80fd\u5920\u5728\u7814\u78e8\u588a\u4e0a\u6709\u8f03\u597d\u7684\u4fdd\u6301\u6027\uff0c\u624d\u80fd\u5920\u4fdd\u6301\u9ad8\u6548\u7387\u7684\u62cb\u5149\u6548\u679c<\/p>\n\n

2.\u7814\u78e8\u588a\u7684\u8868\u9762\u6709\u9069\u7576\u7684\u786c\u5ea6\uff0c\u624d\u80fd\u4fdd\u8b49\u78e8\u5e73\u6548\u679c<\/p>\n\n

3.\u62cb\u5149\u588a\u6709\u8f03\u597d\u7684\u67d4\u8edf\u6027\uff0c\u53ef\u4ee5\u96a8\u8457\u82af\u7247\u7684\u5f4e\u66f2\u800c\u8b8a\u5f62\uff0c\u4ee5\u4fdd\u8b49\u7372\u5f97\u66f4\u597d\u7684\u5747\u52fb\u5ea6<\/p>\n\n

4.\u7814\u78e8\u5f8c\u80fd\u5920\u5c07\u6240\u7522\u751f\u7684\u300c\u526f\u7522\u54c1\u300d\u6392\u51fa\uff0c\u7814\u78e8\u518d\u73fe\u6027\u66f4\u4f73<\/p>\n\n

5.\u6e1b\u5c11\u7814\u78e8\u588a\u6750\u6599\u7684\u96dc\u8cea\uff0c\u4ee5\u7372\u5f97\u826f\u597d\u7684\u6e05\u6f54\u6548\u679c<\/p>\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u7814\u78e8\u53bb\u9664\u7387\u8a72\u5982\u4f55\u8a08\u7b97\uff1f<\/strong><\/p>\n\n\n\n

\u7814\u78e8\u53bb\u9664\u7387\u7531\u76f8\u5c0d\u901f\u5ea6\u3001\u58d3\u529b\u4ee5\u53ca\u6bd4\u4f8b\u5e38\u6578\u6240\u6c7a\u5b9a\uff1b<\/p>\n\n

\u76f8\u5c0d\u901f\u5ea6\u7531CMP\u8a2d\u5099\u7684\u65cb\u8f49\u901f\u5ea6\u6240\u6c7a\u5b9a\uff1b<\/p>\n\n

\u58d3\u529b\u70baCMP\u8a2d\u5099\u4e0a\u7aef\u7d66\u4e88\u7684\u58d3\u529b\uff1b<\/p>\n\n

\u6bd4\u4f8b\u5e38\u6578\u57fa\u65bc\u7814\u78e8\u6db2\u53ca\u7814\u78e8\u588a\u3002<\/p>\n\n

\u56e0\u6b64\uff0c\u53ef\u4ee5\u5f97\u51fa<\/p>\n\n

\u7814\u78e8\u53bb\u9664\u7387 = \u76f8\u5c0d\u901f\u5ea6*\u58d3\u529b*\u6bd4\u4f8b\u5e38\u6578<\/strong><\/p>\n

\n
\"\"
CMP\u8a2d\u5099\u62cb\u5149\u793a\u610f\u5716<\/figcaption><\/figure>\n<\/div>
\n
\"\"
CMP\u62cb\u5149\u5de5\u85dd\u539f\u7406\u793a\u610f\u5716<\/figcaption><\/figure>\n<\/div>","protected":false},"excerpt":{"rendered":"

CMP\u5168\u7a31\u70baChemical-Mechanical Planarization<\/p>\n","protected":false},"author":2,"featured_media":3622,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[236],"tags":[395,238,239,242,396],"class_list":["post-16931","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news-zh-hant","tag-cmp-zh-hant","tag-polishing-zh-hant","tag-polishing-and-sanding-zh-hant","tag-sanding-zh-hant","tag-396"],"yoast_head":"\n\u7121\u640d\u62cb\u5149\u6cd5\u5bf6\uff1a\u7814\u78e8\u6db2\uff08Slurry\uff09 - Makeraze Store<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/makeraze.com\/zh-hant\/2023\/06\/%e7%84%a1%e6%90%8d%e6%8b%8b%e5%85%89%e6%b3%95%e5%af%b6%ef%bc%9a%e7%a0%94%e7%a3%a8%e6%b6%b2%ef%bc%88slurry%ef%bc%89\/\" \/>\n<meta property=\"og:locale\" content=\"zh_TW\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u7121\u640d\u62cb\u5149\u6cd5\u5bf6\uff1a\u7814\u78e8\u6db2\uff08Slurry\uff09 - Makeraze Store\" \/>\n<meta property=\"og:description\" content=\"CMP\u5168\u7a31\u70baChemical-Mechanical Planarization\" \/>\n<meta property=\"og:url\" content=\"https:\/\/makeraze.com\/zh-hant\/2023\/06\/%e7%84%a1%e6%90%8d%e6%8b%8b%e5%85%89%e6%b3%95%e5%af%b6%ef%bc%9a%e7%a0%94%e7%a3%a8%e6%b6%b2%ef%bc%88slurry%ef%bc%89\/\" \/>\n<meta property=\"og:site_name\" content=\"Makeraze Store\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/Makeraze\/\" \/>\n<meta property=\"article:published_time\" content=\"2023-06-25T09:37:33+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2023-06-25T09:37:34+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/makeraze.com\/wp-content\/uploads\/2022\/08\/CMP-3.jpg\" \/>\n\t<meta property=\"og:image:width\" 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